Phtalocyanine based integrated gas sensor

Carmen Moldovan; Lavinia Hinescu; Rodica Iosub; Mihail Hinescu; Mihai Nisulescu; Bogdan Firtat; Mircea Modreanu; Dan Dascalu; Victor Voicu; Cornel Tarabasanu

doi:10.1109/SMICND.2002.1105800

Phtalocyanine based integrated gas sensor

Carmen Moldovan
, Lavinia Hinescu
, Rodica Iosub
, Mihail Hinescu
, Mihai Nisulescu
, Bogdan Firtat
, Mircea Modreanu
, Dan Dascalu
, Victor Voicu
, Cornel Tarabasanu

National Institute for Research and Development in Microtechnologies Romania
Army Center for Medical Research
National University of Science and Technology POLITEHNICA Bucharest

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

The paper presents the layout and the technological steps for an interdigitally integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained different gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NO_x detection. The measurement of sensors for NO_x and NH₃ detection will be presented as concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer. The measurements were made at room temperature but a medium temperature is applied (<200°C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

Original language	English
Title of host publication	2002 25th International Semiconductor Conference, CAS 2002 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	55-58
Number of pages	4
ISBN (Electronic)	0780374401
DOIs	https://doi.org/10.1109/SMICND.2002.1105800
Publication status	Published - 2002
Externally published	Yes
Event	25th International Semiconductor Conference, CAS 2002 - Sinaia, Romania Duration: 8 Oct 2002 → 12 Oct 2002

Publication series

Name	Proceedings of the International Semiconductor Conference, CAS
Volume	1

Conference

Conference	25th International Semiconductor Conference, CAS 2002
Country/Territory	Romania
City	Sinaia
Period	8/10/02 → 12/10/02

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/SMICND.2002.1105800

Cite this

Moldovan, C., Hinescu, L., Iosub, R., Hinescu, M., Nisulescu, M., Firtat, B., Modreanu, M., Dascalu, D., Voicu, V., & Tarabasanu, C. (2002). Phtalocyanine based integrated gas sensor. In 2002 25th International Semiconductor Conference, CAS 2002 - Proceedings (pp. 55-58). Article 1105800 (Proceedings of the International Semiconductor Conference, CAS; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMICND.2002.1105800

@inproceedings{2422f5cc8a3841848ccada690073f419,

title = "Phtalocyanine based integrated gas sensor",

abstract = "The paper presents the layout and the technological steps for an interdigitally integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained different gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NOx detection. The measurement of sensors for NOx and NH3 detection will be presented as concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer. The measurements were made at room temperature but a medium temperature is applied (<200°C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.",

author = "Carmen Moldovan and Lavinia Hinescu and Rodica Iosub and Mihail Hinescu and Mihai Nisulescu and Bogdan Firtat and Mircea Modreanu and Dan Dascalu and Victor Voicu and Cornel Tarabasanu",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; 25th International Semiconductor Conference, CAS 2002 ; Conference date: 08-10-2002 Through 12-10-2002",

year = "2002",

doi = "10.1109/SMICND.2002.1105800",

language = "English",

series = "Proceedings of the International Semiconductor Conference, CAS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "55--58",

booktitle = "2002 25th International Semiconductor Conference, CAS 2002 - Proceedings",

address = "United States",

}

Moldovan, C, Hinescu, L, Iosub, R, Hinescu, M, Nisulescu, M, Firtat, B, Modreanu, M, Dascalu, D, Voicu, V & Tarabasanu, C 2002, Phtalocyanine based integrated gas sensor. in 2002 25th International Semiconductor Conference, CAS 2002 - Proceedings., 1105800, Proceedings of the International Semiconductor Conference, CAS, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 55-58, 25th International Semiconductor Conference, CAS 2002, Sinaia, Romania, 8/10/02. https://doi.org/10.1109/SMICND.2002.1105800

Phtalocyanine based integrated gas sensor. / Moldovan, Carmen; Hinescu, Lavinia; Iosub, Rodica et al.
2002 25th International Semiconductor Conference, CAS 2002 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2002. p. 55-58 1105800 (Proceedings of the International Semiconductor Conference, CAS; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Phtalocyanine based integrated gas sensor

AU - Moldovan, Carmen

AU - Hinescu, Lavinia

AU - Iosub, Rodica

AU - Hinescu, Mihail

AU - Nisulescu, Mihai

AU - Firtat, Bogdan

AU - Modreanu, Mircea

AU - Dascalu, Dan

AU - Voicu, Victor

AU - Tarabasanu, Cornel

PY - 2002

Y1 - 2002

N2 - The paper presents the layout and the technological steps for an interdigitally integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained different gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NOx detection. The measurement of sensors for NOx and NH3 detection will be presented as concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer. The measurements were made at room temperature but a medium temperature is applied (<200°C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

AB - The paper presents the layout and the technological steps for an interdigitally integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained different gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NOx detection. The measurement of sensors for NOx and NH3 detection will be presented as concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer. The measurements were made at room temperature but a medium temperature is applied (<200°C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

UR - https://www.scopus.com/pages/publications/84867047078

U2 - 10.1109/SMICND.2002.1105800

DO - 10.1109/SMICND.2002.1105800

M3 - Conference proceeding

AN - SCOPUS:84867047078

T3 - Proceedings of the International Semiconductor Conference, CAS

SP - 55

EP - 58

BT - 2002 25th International Semiconductor Conference, CAS 2002 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 25th International Semiconductor Conference, CAS 2002

Y2 - 8 October 2002 through 12 October 2002

ER -

Moldovan C, Hinescu L, Iosub R, Hinescu M, Nisulescu M, Firtat B et al. Phtalocyanine based integrated gas sensor. In 2002 25th International Semiconductor Conference, CAS 2002 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2002. p. 55-58. 1105800. (Proceedings of the International Semiconductor Conference, CAS). doi: 10.1109/SMICND.2002.1105800

Phtalocyanine based integrated gas sensor

Abstract

Publication series

Conference

UN SDGs

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