@inbook{2422f5cc8a3841848ccada690073f419,
title = "Phtalocyanine based integrated gas sensor",
abstract = "The paper presents the layout and the technological steps for an interdigitally integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained different gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NOx detection. The measurement of sensors for NOx and NH3 detection will be presented as concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer. The measurements were made at room temperature but a medium temperature is applied (<200°C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.",
author = "Carmen Moldovan and Lavinia Hinescu and Rodica Iosub and Mihail Hinescu and Mihai Nisulescu and Bogdan Firtat and Mircea Modreanu and Dan Dascalu and Victor Voicu and Cornel Tarabasanu",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; 25th International Semiconductor Conference, CAS 2002 ; Conference date: 08-10-2002 Through 12-10-2002",
year = "2002",
doi = "10.1109/SMICND.2002.1105800",
language = "English",
series = "Proceedings of the International Semiconductor Conference, CAS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "55--58",
booktitle = "2002 25th International Semiconductor Conference, CAS 2002 - Proceedings",
address = "United States",
}
