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Piezo- and pyroelectric properties of lead scandium tantalate thin films
A. P. De Kroon
, S. C. Dunn
, R. W. Whatmore
Tyndall Micronano Electronics
Cranfield University
Sch. of Industr./Mfg. Science
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Material Science
Thin Films
100%
Scandium
100%
Tantalate
100%
Film
50%
X-Ray Diffraction
25%
Annealing
25%
Piezoelectricity
25%
Spin Coating
25%
Atomic Force Microscopy
25%
Sol-Gel
25%
Solution Chemistry
25%
Engineering
Thin Films
100%
Si Substrate
25%
Silicon Dioxide
25%
Deposition Condition
25%
Rapid Thermal Annealing
25%
Atomic Force Microscopy
25%
Piezoelectric
25%
Figure of Merit
25%
Crystallization Point
25%
Drying Time
25%
X Ray Diffraction
25%