Planar On-Silicon Inductor Design for Electromagnetic Tracking

Aleksandr Sidun; Manish Srivastava; Kilian O'donoghue; Herman Alexander Jaeger; Marco Cavaliere; Daniel O'hare; Christian Van Den Bosch; Padraig Cantillon-Murphy

doi:10.1109/JSEN.2023.3296471

Planar On-Silicon Inductor Design for Electromagnetic Tracking

Aleksandr Sidun
, Manish Srivastava
, Kilian O'donoghue
, Herman Alexander Jaeger
, Marco Cavaliere
, Daniel O'hare
, Christian Van Den Bosch
, Padraig Cantillon-Murphy

Research output: Contribution to journal › Article › peer-review

Abstract

In this article, a planar on-silicon inductor design for electromagnetic tracking (EMT) is presented. The design process has been demonstrated for a planar sensing coil in a 65-nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V /T/Hz. The designed inductor satisfies system requirements for clinical use in EMT applications. The current design has been verified on the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μV/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multilayer planar inductor designs is also proposed.

Original language	English
Pages (from-to)	21129-21136
Number of pages	8
Journal	IEEE Sensors Journal
Volume	23
Issue number	18
DOIs	https://doi.org/10.1109/JSEN.2023.3296471
Publication status	Published - 15 Sept 2023

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

CMOS
electromagnetic sensing
electromagnetic tracking (EMT)
inductor
parameterized cell (PCELL)
SKILL programming language
virtual bronchoscopy

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10.1109/JSEN.2023.3296471

Cite this

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title = "Planar On-Silicon Inductor Design for Electromagnetic Tracking",

abstract = "In this article, a planar on-silicon inductor design for electromagnetic tracking (EMT) is presented. The design process has been demonstrated for a planar sensing coil in a 65-nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V /T/Hz. The designed inductor satisfies system requirements for clinical use in EMT applications. The current design has been verified on the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μV/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multilayer planar inductor designs is also proposed.",

keywords = "CMOS, electromagnetic sensing, electromagnetic tracking (EMT), inductor, parameterized cell (PCELL), SKILL programming language, virtual bronchoscopy",

author = "Aleksandr Sidun and Manish Srivastava and Kilian O'donoghue and Jaeger, \{Herman Alexander\} and Marco Cavaliere and Daniel O'hare and \{Van Den Bosch\}, Christian and Padraig Cantillon-Murphy",

note = "Publisher Copyright: {\textcopyright} 2001-2012 IEEE.",

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doi = "10.1109/JSEN.2023.3296471",

language = "English",

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T1 - Planar On-Silicon Inductor Design for Electromagnetic Tracking

AU - Sidun, Aleksandr

AU - Srivastava, Manish

AU - O'donoghue, Kilian

AU - Jaeger, Herman Alexander

AU - Cavaliere, Marco

AU - O'hare, Daniel

AU - Van Den Bosch, Christian

AU - Cantillon-Murphy, Padraig

PY - 2023/9/15

Y1 - 2023/9/15

N2 - In this article, a planar on-silicon inductor design for electromagnetic tracking (EMT) is presented. The design process has been demonstrated for a planar sensing coil in a 65-nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V /T/Hz. The designed inductor satisfies system requirements for clinical use in EMT applications. The current design has been verified on the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μV/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multilayer planar inductor designs is also proposed.

AB - In this article, a planar on-silicon inductor design for electromagnetic tracking (EMT) is presented. The design process has been demonstrated for a planar sensing coil in a 65-nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V /T/Hz. The designed inductor satisfies system requirements for clinical use in EMT applications. The current design has been verified on the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μV/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multilayer planar inductor designs is also proposed.

KW - CMOS

KW - electromagnetic sensing

KW - electromagnetic tracking (EMT)

KW - inductor

KW - parameterized cell (PCELL)

KW - SKILL programming language

KW - virtual bronchoscopy

UR - https://www.scopus.com/pages/publications/85165315219

U2 - 10.1109/JSEN.2023.3296471

DO - 10.1109/JSEN.2023.3296471

M3 - Article

AN - SCOPUS:85165315219

SN - 1530-437X

VL - 23

SP - 21129

EP - 21136

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 18

ER -

Planar On-Silicon Inductor Design for Electromagnetic Tracking

Abstract

UN SDGs

Keywords

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