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Polycrystalline silicon PhC cavities for CMOS on-chip integration

  • S. Iadanza
  • , G. C.R. Devarapu
  • , A. Blake
  • , P. Acosta Alba
  • , J. M. Pedini
  • , L. O’Faolain
  • Munster Technological University
  • Université Grenoble Alpes

Research output: Contribution to journal › Article › peer-review

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