Powwer supply on chip: Integration of inductors and capacitors with active semiconductors

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

The paper introduces the concept of power supply on chip (PwrSoC) which will enable the development of next generation, functionally integrated, power management platforms with applications in dc-dc conversion, gate drives, isolated power transmission and ultimately, high granularity, on-chip, power management for mixed-signal, SOC chips. PwrSoC will integrate power passives with the power management IC, in a 3D stacked or monolithic form factor, thereby delivering the performance of a high efficiency dc-dc converter within the footprint of a low efficiency linear regulator. A central element of the PwrSoC concept is the fabrication of power micro-magnetics on silicon to deliver micro-inductors and micro-transformers. The paper details the magnetics on silicon process which combines thin film magnetic core technology with electroplated copper conductors. Measured data for micro-inductors show inductance operation up to 20MHz, footprints down to 0.5mm 2, efficiencies up to 93% and dc current carrying capability up to 600mA. Measurements on micro-transformers show voltage gain of approximately -1dB at between 10MHz and 30 MHz.

Original languageEnglish
Title of host publicationProceedings of the 2012 24th International Symposium on Power Semiconductor Devices and ICs, ISPSD'12
Pages319-323
Number of pages5
DOIs
Publication statusPublished - 2012
Event24th International Symposium on Power Semiconductor Devices and ICs, ISPSD'12 - Bruges, Belgium
Duration: 3 Jun 20127 Jun 2012

Publication series

NameProceedings of the International Symposium on Power Semiconductor Devices and ICs
ISSN (Print)1063-6854

Conference

Conference24th International Symposium on Power Semiconductor Devices and ICs, ISPSD'12
Country/TerritoryBelgium
CityBruges
Period3/06/127/06/12

Keywords

  • functional integration
  • magnetics on silicon
  • micro-inductors
  • micro-transformers
  • power management
  • power passives
  • power supply on chip
  • PrwSoC
  • thin film magnetic cor

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