Preface

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	1
Number of pages	1
Journal	Materials Science in Semiconductor Processing
Volume	62
DOIs	https://doi.org/10.1016/j.mssp.2017.02.010
Publication status	Published - 1 May 2017

Access to Document

@article{55f13afb525b4324afa303d8118b884e,

title = "Preface",

author = "Enrico Napolitani and Jim Williams and Ray Duffy",

year = "2017",

month = may,

day = "1",

doi = "10.1016/j.mssp.2017.02.010",

language = "English",

volume = "62",

pages = "1",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier Ltd",

}

TY - JOUR

T1 - Preface

AU - Napolitani, Enrico

AU - Williams, Jim

AU - Duffy, Ray

PY - 2017/5/1

Y1 - 2017/5/1

UR - https://www.scopus.com/pages/publications/85014534086

U2 - 10.1016/j.mssp.2017.02.010

DO - 10.1016/j.mssp.2017.02.010

M3 - Editorial

AN - SCOPUS:85014534086

SN - 1369-8001

VL - 62

SP - 1

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

ER -