Preface

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	859
Number of pages	1
Journal	Materials Science in Semiconductor Processing
Volume	9
Issue number	6
DOIs	https://doi.org/10.1016/j.mssp.2006.10.002
Publication status	Published - Dec 2006

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@article{5f7b2c483aaf46d49559898d66e52fd3,

title = "Preface",

author = "J. Dabrowski and Hurley, \{P. K.\} and J. Murota and Weber, \{E. R.\}",

year = "2006",

month = dec,

doi = "10.1016/j.mssp.2006.10.002",

language = "English",

volume = "9",

pages = "859",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier Ltd",

number = "6",

}

TY - JOUR

T1 - Preface

AU - Dabrowski, J.

AU - Hurley, P. K.

AU - Murota, J.

AU - Weber, E. R.

PY - 2006/12

Y1 - 2006/12

UR - https://www.scopus.com/pages/publications/33846047008

U2 - 10.1016/j.mssp.2006.10.002

DO - 10.1016/j.mssp.2006.10.002

M3 - Editorial

AN - SCOPUS:33846047008

SN - 1369-8001

VL - 9

SP - 859

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

IS - 6

ER -