Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al 2 O 3/InGaAs stacks

Enrico Caruso; Jun Lin; KF Burke; Karim Cherkaoui; David Esseni; Farzan Gity; Scott Monaghan; Pierpaolo Palestri; P Hurley; Luca Selmi

Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al 2 O 3/InGaAs stacks

Enrico Caruso
, Jun Lin
, KF Burke
, Karim Cherkaoui
, David Esseni
, Farzan Gity
, Scott Monaghan
, Pierpaolo Palestri
, P Hurley
, Luca Selmi

Tyndall MicroNano Systems

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Original language	Undefined/Unknown
Title of host publication	2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Publication status	Published - 2018

Cite this

@inproceedings{9ab67b6269da4d84b5eabc69e387b92d,

title = "Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al 2 O 3/InGaAs stacks",

author = "Enrico Caruso and Jun Lin and KF Burke and Karim Cherkaoui and David Esseni and Farzan Gity and Scott Monaghan and Pierpaolo Palestri and P Hurley and Luca Selmi",

year = "2018",

language = "Undefined/Unknown",

booktitle = "2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)",

}

Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al 2 O 3/InGaAs stacks. / Caruso, Enrico; Lin, Jun; Burke, KF et al.
2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS). 2018.

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al 2 O 3/InGaAs stacks

AU - Caruso, Enrico

AU - Lin, Jun

AU - Burke, KF

AU - Cherkaoui, Karim

AU - Esseni, David

AU - Gity, Farzan

AU - Monaghan, Scott

AU - Palestri, Pierpaolo

AU - Hurley, P

AU - Selmi, Luca

PY - 2018

Y1 - 2018

M3 - Conference proceeding

BT - 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)

ER -