@inbook{51578efdbfd6475891f9f938a6220277,
title = "Programmable silicon photonic circuits powered by MEMS",
abstract = "We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.",
keywords = "Micro-electromechanical Systems, Programmable Photonics, Silicon Photonics",
author = "Wim Bogaerts and Takabayashi, \{Alain Yuji\} and Pierre Edinger and Gaehun Jo and Iman Zand and Peter Verheyen and Moises Jezzini and Hamed Sattari and Giuseppe Talli and Cleitus Antony and Mehrdad Saei and Arce, \{Cristina Lerma\} and Lee, \{Jun Su\} and Mallik, \{Arun Kumar\} and Saurav Kumar and Marco Garcia and Tigers Jonuzi and Gylfason, \{Kristinn B.\} and Niels Quack and Frank Niklaus and Umar Khan",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE.; Smart Photonic and Optoelectronic Integrated Circuits 2022 ; Conference date: 20-02-2002 Through 24-02-2002",
year = "2022",
doi = "10.1117/12.2614213",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sailing He and Sailing He and Laurent Vivien",
booktitle = "Smart Photonic and Optoelectronic Integrated Circuits 2022",
address = "United States",
}