Pyroelectric and electro-optic properties of sol-gel and dual ion beam sputtered PLZT thin films

  • D. A. Tossell
  • , J. S. Obhi
  • , N. M. Shorrocks
  • , A. Patel
  • , R. W. Whatmore

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

The deposition of ferroelectric films using sol-gel and dual ion beam sputtering (DIBS) has been demonstrated. In the DIBS process, the presence of active oxygen has been found to be essential to the formation of perovskite PLZT (La-doped lead zirconate titanate) films. Electrooptic (EO) and pyroelectric effects have been observed in these films. A large quadratic EO efficient of 2.110-16 m2/V2 was observed in reflection mode for PLZT (28/0/100), but this could not be repeated in a transmission mode, presumably because birefringence and thickness changes work in opposite senses. Peak pyroelectric coefficients of 400 mu mC/m2K have been observed for PLZT (0/0/100) and (7/0/100) films. Sol-gel has produced PLZT (0/50/50) and (0/30/70) films with similar properties and has shown potential for film formation at temperatures as low as 450 degrees C. The results reported here are encouraging with respect to the goal of fully integrating uncooled infrared-detector elements on silicon readout circuitry.

Original languageEnglish
Title of host publicationISAF 1992 - Proceedings of the 8th IEEE International Symposium on Applications of Ferroelectrics
EditorsMichael Liu, Ahmad Safari, Angus Kingon, Gene Haertling
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages11-18
Number of pages8
ISBN (Electronic)0780304659, 9780780304659
DOIs
Publication statusPublished - 1992
Externally publishedYes
Event8th IEEE International Symposium on Applications of Ferroelectrics, ISAF 1992 - Greenville, United States
Duration: 30 Aug 19922 Sep 1992

Publication series

NameISAF 1992 - Proceedings of the 8th IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference8th IEEE International Symposium on Applications of Ferroelectrics, ISAF 1992
Country/TerritoryUnited States
CityGreenville
Period30/08/922/09/92

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