Abstract
A report on the fabrication process and s-parameter measurement of lead zirconate titanate (PZT) thin film bulk acoustic wave resonator (FBAR) using high quality PZT thin film was presented. The acoustic properties and electromechanical coupling coefficient of PZT thin films were evaluated. The resonant frequency was found to be varied with the bias between ground and signal and also provided another way for frequency tuning and temperature compensation.
| Original language | English |
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| Number of pages | 8 |
| Publication status | Published - 2001 |
Publication series
| Name | Proceedings of the Annual IEEE International Frequency Control Symposium |
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| ISSN (Print) | 0161-6404 |