Quantification of Trace-Level Silicon Doping in Al x Ga 1-x N Films Using Wavelength-Dispersive X-Ray Microanalysis
- Lucia Spasevski
- , Ben Buse
- , Paul R. Edwards
- , Daniel A. Hunter
- , Johannes Enslin
- , Humberto M. Foronda
- , Tim Wernicke
- , Frank Mehnke
- , Peter J. Parbrook
- , Michael Kneissl
- , Robert W. Martin
Research output: Contribution to journal › Article › peer-review