@article{5810b5116a81446cb13256ef5fbbe60e,
title = "Real Time In-Situ Probing of Atomic Layer Deposition Processes using Infrared and Near Infrared Spectroscopy",
keywords = "Infrared, Infrared spectroscopy, In situ, Layer (electronics), Deposition (geology), Atomic layer deposition, Spectroscopy, Analytical Chemistry (journal), Materials science, Chemistry, Nanotechnology, Optics, Environmental chemistry, Geology, Physics, Organic chemistry, Paleontology, Quantum mechanics, Sediment",
author = "Ian Povey",
year = "2008",
doi = "10.1149/ma2008-02/24/1911",
language = "English",
journal = "Meeting Abstracts",
issn = "1091-8213",
}