Reflectance study of SiO2/Si3N4 dielectric Bragg reflectors

Anna Szerling; Dorota Wawer; Krzysztof Hejduk; Tomasz Piwoński; Anna Wójcik; Bohdan Mroziewicz; Maciej Bugajski

Reflectance study of SiO₂/Si₃N₄ dielectric Bragg reflectors

Anna Szerling
, Dorota Wawer
, Krzysztof Hejduk
, Tomasz Piwoński
, Anna Wójcik
, Bohdan Mroziewicz
, Maciej Bugajski

Institute of Microelectronics and Photonics

Research output: Contribution to journal › Article › peer-review

Abstract

We present the results of reflectance investigations into SiO₂/Si₃N₄ dielectric distributed Bragg reflectors (DBR). The dielectric multilayers forming reflectors have been deposited by plasma enhanced chemical vapour deposition (PECVD) on silicon substrates. Such structures can be utilised in vertical cavity surface emitting lasers (VCSELs) and resonant cavity light emitting diodes (RC LEDs).

Original language	English
Pages (from-to)	523-527
Number of pages	5
Journal	Optica Applicata
Volume	32
Issue number	3
Publication status	Published - 2002
Externally published	Yes

Cite this

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title = "Reflectance study of SiO2/Si3N4 dielectric Bragg reflectors",

abstract = "We present the results of reflectance investigations into SiO2/Si3N4 dielectric distributed Bragg reflectors (DBR). The dielectric multilayers forming reflectors have been deposited by plasma enhanced chemical vapour deposition (PECVD) on silicon substrates. Such structures can be utilised in vertical cavity surface emitting lasers (VCSELs) and resonant cavity light emitting diodes (RC LEDs).",

author = "Anna Szerling and Dorota Wawer and Krzysztof Hejduk and Tomasz Piwo{\'n}ski and Anna W{\'o}jcik and Bohdan Mroziewicz and Maciej Bugajski",

year = "2002",

language = "English",

volume = "32",

pages = "523--527",

journal = "Optica Applicata",

issn = "0078-5466",

publisher = "Wroclaw University of Science and Technology",

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T1 - Reflectance study of SiO2/Si3N4 dielectric Bragg reflectors

AU - Szerling, Anna

AU - Wawer, Dorota

AU - Hejduk, Krzysztof

AU - Piwoński, Tomasz

AU - Wójcik, Anna

AU - Mroziewicz, Bohdan

AU - Bugajski, Maciej

PY - 2002

Y1 - 2002

N2 - We present the results of reflectance investigations into SiO2/Si3N4 dielectric distributed Bragg reflectors (DBR). The dielectric multilayers forming reflectors have been deposited by plasma enhanced chemical vapour deposition (PECVD) on silicon substrates. Such structures can be utilised in vertical cavity surface emitting lasers (VCSELs) and resonant cavity light emitting diodes (RC LEDs).

AB - We present the results of reflectance investigations into SiO2/Si3N4 dielectric distributed Bragg reflectors (DBR). The dielectric multilayers forming reflectors have been deposited by plasma enhanced chemical vapour deposition (PECVD) on silicon substrates. Such structures can be utilised in vertical cavity surface emitting lasers (VCSELs) and resonant cavity light emitting diodes (RC LEDs).

UR - https://www.scopus.com/pages/publications/0036938498

M3 - Article

AN - SCOPUS:0036938498

SN - 0078-5466

VL - 32

SP - 523

EP - 527

JO - Optica Applicata

JF - Optica Applicata

IS - 3

ER -

Reflectance study of SiO₂/Si₃N₄ dielectric Bragg reflectors

Abstract

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