@inbook{4964fa7f6a894e9e87c07f1913451039,
title = "Reliable super resolution beam profiler for lasers in manufacturing",
abstract = "Demonstrated is a first of a kind hybrid analog-digital laser beam profiler based on a Digital Micro-Mirror Device. Tests at 1550 nm show a 2 micron profiling resolution over a 600 micron side square zone.",
author = "Riza, \{Nabeel A.\} and Ghauri, \{Farzan N.\}",
year = "2006",
language = "English",
isbn = "1557528136",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2006",
note = "Conference on Lasers and Electro-Optics, CLEO 2006 ; Conference date: 21-05-2006 Through 21-05-2006",
}
