@inbook{9302bc3d743044108d053a130e1315ea,
title = "Reliable super resolution beam profiler for lasers in manufacturing",
abstract = "Demonstrated is a first of a kind hybrid analog-digital laser beam profiler based on a Digital Micro-Mirror Device. Tests at 1550 nm show a 2 micron profiling resolution over a 600 micron side square zone.",
author = "Riza, \{Nabeel A.\} and Ghauri, \{Farzan N.\}",
year = "2005",
language = "English",
isbn = "1557527709",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2005",
note = "Conference on Lasers and Electro-Optics, CLEO 2005 ; Conference date: 22-05-2005 Through 22-05-2005",
}
