RF Plasma Monolayer Doping of Si Nanowires
- Alexei N. Nazarov
- , Yuri V. Gomeniuk
- , Noel Kennedy
- , Vladimir I. Glotov
- , Pavel N. Okholin
- , Brenda Long
- , Tamara M. Nazarova
- , Ray Duffy
- NASU - Institute of Semiconductors Physics
- National Academy of Sciences of Ukraine
- National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute"
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review