Ruthenium(ii) carbonyl amidates - a new class of precursors for atomic layer deposition

Jorit Obenluneschloss; Cara-Lena Nies; Michael Gock; Michael Unkrig-Bau; Jan-Niklas Huster; Michael Nolan; Anjana Devi

doi:10.1039/d5dt02610e

Ruthenium(ii) carbonyl amidates - a new class of precursors for atomic layer deposition

Jorit Obenluneschloss
, Cara-Lena Nies
, Michael Gock
, Michael Unkrig-Bau
, Jan-Niklas Huster
, Michael Nolan
, Anjana Devi

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	5
Journal	Dalton Transactions
DOIs	https://doi.org/10.1039/d5dt02610e
Publication status	Published - 28 Jan 2026

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AU - Obenluneschloss, Jorit

AU - Nies, Cara-Lena

AU - Gock, Michael

AU - Unkrig-Bau, Michael

AU - Huster, Jan-Niklas

AU - Nolan, Michael

AU - Devi, Anjana

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Ruthenium(ii) carbonyl amidates - a new class of precursors for atomic layer deposition

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