Scalable high-k metal-insulator-metal capacitors with low leakage, high breakdown fields and improved voltage linearity

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@article{25acc76123664ccaa79187d38d830065,

title = "Scalable high-k metal-insulator-metal capacitors with low leakage, high breakdown fields and improved voltage linearity",

author = "Ailbe O'Manachain",

year = "2012",

doi = "10.1049/el.2011.3849",

language = "Undefined/Unknown",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons Inc.",

}