@inproceedings{e9b6905b5fba4114974489764d8793f2,
title = "Scaling low power embedded flash EEPROMs to 0.18um",
abstract = "In this paper issues for the scaling of embedded flash EEPROMs for the integration in a O.18J.Lm CMOS process are discussed. It is shown that critical tradeoffs between process variables, operating conditions and cell size complicate the scaling procedure. However, through the application of a suitable simulation methodology, limiting factors can be identified and analysed and thus these tradeoffs can be resolved efficiently. O.18J.Lm CMOS process runs with the embedded flash EEPROM option have been successfully completed and devices have been measured and characterised.",
author = "R. Duffy and A. Concannon and A. Mathewson and M. Slotboom and D. Dormans and N. Wils and R. Verhaar",
year = "1999",
language = "English",
series = "European Solid-State Device Research Conference",
publisher = "IEEE Computer Society",
pages = "620--623",
editor = "R.P. Mertens and H. Grunbacher and H.E. Maes and G. Declerck",
booktitle = "ESSDERC 1999 - Proceeding of the 29th European Solid-State Device Research Conference",
address = "United States",
note = "29th European Solid-State Device Research Conference, ESSDERC 1999 ; Conference date: 13-09-1999 Through 15-09-1999",
}