Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films

Emma Coleman; Scott Monaghan; Farzan Gity; Gioele Mirabelli; Ray Duffy; Brendan Sheehan; Shashank Balasubramanyam; Ageeth A. A. Bol; Paul Hurley

doi:10.1063/5.0151592

Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films

Emma Coleman
, Scott Monaghan
, Farzan Gity
, Gioele Mirabelli
, Ray Duffy
, Brendan Sheehan
, Shashank Balasubramanyam
, Ageeth A. A. Bol
, Paul Hurley

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Applied Physics Letters
DOIs	https://doi.org/10.1063/5.0151592
Publication status	Published - 2023

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10.1063/5.0151592

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@article{7100ceff5ba04e348f46a93844c1902d,

title = "Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films",

author = "Emma Coleman and Scott Monaghan and Farzan Gity and Gioele Mirabelli and Ray Duffy and Brendan Sheehan and Shashank Balasubramanyam and Bol, \{Ageeth A. A.\} and Paul Hurley",

year = "2023",

doi = "10.1063/5.0151592",

language = "Undefined/Unknown",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films

AU - Coleman, Emma

AU - Monaghan, Scott

AU - Gity, Farzan

AU - Mirabelli, Gioele

AU - Duffy, Ray

AU - Sheehan, Brendan

AU - Balasubramanyam, Shashank

AU - Bol, Ageeth A. A.

AU - Hurley, Paul

PY - 2023

Y1 - 2023

UR - https://publons.com/wos-op/publon/62383661/

U2 - 10.1063/5.0151592

DO - 10.1063/5.0151592

M3 - Article

SN - 0003-6951

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -

Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films

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