Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements

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Abstract

Propose here unique wavelength and hybrid wavelength-polarization and wavelength-polarization-time-multiplexed heterodyne optical interferometers using an internal self-referencing scheme enabling Angstrom level sensitivity optical path-length measurements. As a first step, a proof-of-concept wavelength multiplexed scanning heterodyne interferometer is built to test the surface quality of a test mirror, demonstrating ± 100 Å profile variations with a 0.9 Å accuracy. The hybrid wavelength-polarization and wavelength-polarization-time-multiplexed interferometers can be used to form spectrally coded distributed sensors.

Original languageEnglish
Article number125603
JournalOptical Engineering
Volume45
Issue number12
DOIs
Publication statusPublished - Dec 2006
Externally publishedYes

Keywords

  • Acousto-optic deflectors
  • Heterodyne optical interferometers
  • Optical sensors
  • Scanning interferometers

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