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Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences

  • Colm O'Dwyer (Editor)
  • , Lance Li (Editor)
  • , Peter Mascher (Editor)
  • , Gary W Hunter (Editor)
  • , Durga Misra (Editor)
  • , S. De Gendt (Editor)
  • , K. Kita (Editor)
  • , K. Kakushima (Editor)
  • , Uroš Cvelbar (Editor)
  • , Fred Roozeboom (Editor)
  • The University of Hong Kong
  • McMaster University
  • NASA Glenn Research Center
  • New Jersey Institute of Technology
  • Interuniversitair Micro-Elektronica Centrum
  • Jožef Stefan Institut
  • NXP Semiconductors
  • Koninklijke Philips N.V.

Research output: Book/Report › Anthology/Edited volume › peer-review

Abstract

Proceedings of PRiME 2020: Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences
Original languageEnglish (Ireland)
Place of PublicationPennington, NJ
PublisherElectrochemical Society
Number of pages160
ISBN (Electronic)1938-5862
DOIs
Publication statusPublished - Oct 2020

Publication series

NameECS Transactions
PublisherElectrochemical Society
No.3
Volume98
ISSN (Electronic)1938-5862

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 7 - Affordable and Clean Energy
    SDG 7 Affordable and Clean Energy

Keywords

  • Nanoelectronics
  • plasma

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