Semipolar (112¯2) InGaN light-emitting diodes grown on chemically-mechanically polished GaN templates

  • Duc V. Dinh
  • , Mahbub Akhter
  • , Silvino Presa
  • , Grzegorz Kozlowski
  • , Donagh O'Mahony
  • , Pleun P. Maaskant
  • , Frank Brunner
  • , Marian Caliebe
  • , Markus Weyers
  • , Ferdinand Scholz
  • , Brian Corbett
  • , Peter J. Parbrook

Research output: Contribution to journalArticlepeer-review

Abstract

InGaN multiple quantum well light-emitting diodes (LEDs) were grown on chemically-mechanically polished (112¯2) GaN templates (up to 100 mm diameter wafers) by metalorganic vapour phase epitaxy. Initial GaN overgrowth on the polished templates in nitrogen ambient maintained the polished surface. The peak emission wavelength of the LEDs varied from 445 to 550 nm. In contrast to the simultaneously grown LEDs on as-grown templates, the LEDs on polished templates have very smooth surface morphology, uniform luminescence, and higher output power.

Original languageEnglish
Pages (from-to)2196-2200
Number of pages5
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume212
Issue number10
DOIs
Publication statusPublished - 1 Oct 2015

Keywords

  • GaN templates
  • InGaN
  • Luminescence
  • metal-organic vapour phase epitaxy
  • nitrides
  • polishing
  • semipolar light-emitting diodes

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