@inbook{30efc2a060dc48ffac0ea8d6f04df0e6,
title = "Sensitivity analysis and fine tuning of em simulation for cpw transmission line characterization",
abstract = "This paper addresses the issue of thin-film characterization through wafer-probe measurements and electromagnetic simulation (EM simulation). The parameters are optimized to get the best fit between measured and simulated S-parameters. Based on the results obtained an optimization methodology for modeling the test structure is presented. The optimization methodology has been verified by investigating the S-parameters of Coplanar-Waveguide (CPW) transmission lines with a known SiO2 layer using CAD simulations and two-port S-parameter measurements up to 6 GHz. The combination of CAD simulation and S-parameter measurement is shown to be suitable for characterization of dielectric materials.",
author = "Wenbin Chen and Alan Mathewson and McCarthy, \{Kevin G.\}",
year = "2009",
doi = "10.1109/RME.2009.5201350",
language = "English",
isbn = "9781424437344",
series = "2009 Ph.D. Research in Microelectronics and Electronics, PRIME 2009",
pages = "260--263",
booktitle = "2009 Ph.D. Research in Microelectronics and Electronics, PRIME 2009",
note = "2009 Ph.D. Research in Microelectronics and Electronics, PRIME 2009 ; Conference date: 12-07-2009 Through 17-07-2009",
}