@inproceedings{512043e93d77454895a8ac4e0dec63f1,
title = "Si-based resonant cavity photodetector with a buried oxide reflector using a separation-by-implantation-of-oxygen substrate",
abstract = "We report on a novel Si-based resonant cavity photodetector with a buried oxide bottom reflector, by using a separation-byimplantation- oi-oxygen (SIMOX) substrate. The cavity shows very strong Fabry-Perot oscillations, with a peak responsivity of about 50 mAIW at 658 nm and 709 nm. Strong contrast between resonant and antiresonant conditions in the responsivity is observed.",
author = "M. Seto and Sinnis, \{V. S.\} and Morrison, \{A. P.\} and W. Hoekstra and \{De Boer\}, \{W. B.\}",
year = "1998",
language = "English",
series = "European Solid-State Device Research Conference",
publisher = "IEEE Computer Society",
pages = "196--199",
editor = "A. Touboul and Y. Danto and H. Grunbacher",
booktitle = "ESSDERC 1998 - Proceedings of the 28th European Solid-State Device Research Conference",
address = "United States",
note = "28th European Solid-State Device Research Conference, ESSDERC 1998 ; Conference date: 08-09-1998 Through 10-09-1998",
}