Silicon-micromachined spacers for UHF cavity resonators

Dimitra Psychogiou; Michael D. Sinanis; Dimitrios Peroulis

doi:10.1109/MEMSYS.2015.7051135

Silicon-micromachined spacers for UHF cavity resonators

Dimitra Psychogiou
, Michael D. Sinanis
, Dimitrios Peroulis

Purdue University

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1020-1023
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051135
Publication status	Published - 26 Feb 2015
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

Access to Document

10.1109/MEMSYS.2015.7051135

Cite this

Psychogiou, D., Sinanis, M. D., & Peroulis, D. (2015). Silicon-micromachined spacers for UHF cavity resonators. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 1020-1023). Article 7051135 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051135

Psychogiou, Dimitra ; Sinanis, Michael D. ; Peroulis, Dimitrios. / Silicon-micromachined spacers for UHF cavity resonators. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1020-1023 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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abstract = "This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5\%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.",

author = "Dimitra Psychogiou and Sinanis, \{Michael D.\} and Dimitrios Peroulis",

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language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Psychogiou, D, Sinanis, MD & Peroulis, D 2015, Silicon-micromachined spacers for UHF cavity resonators. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051135, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 1020-1023, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051135

Silicon-micromachined spacers for UHF cavity resonators. / Psychogiou, Dimitra; Sinanis, Michael D.; Peroulis, Dimitrios.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1020-1023 7051135 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

TY - CHAP

T1 - Silicon-micromachined spacers for UHF cavity resonators

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AU - Sinanis, Michael D.

AU - Peroulis, Dimitrios

PY - 2015/2/26

Y1 - 2015/2/26

N2 - This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.

AB - This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.

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M3 - Chapter

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1020

EP - 1023

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

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Psychogiou D, Sinanis MD, Peroulis D. Silicon-micromachined spacers for UHF cavity resonators. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1020-1023. 7051135. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051135

Silicon-micromachined spacers for UHF cavity resonators

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