TY - GEN
T1 - Silicon-micromachined spacers for UHF cavity resonators
AU - Psychogiou, Dimitra
AU - Sinanis, Michael D.
AU - Peroulis, Dimitrios
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/2/26
Y1 - 2015/2/26
N2 - This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.
AB - This paper reports on a novel hybrid integration concept that enables the realization of high-quality (Q) factor, low-frequency coaxial cavity resonators with well-defined capacitive-loading and variable center frequency. It is based on a silicon-micromachined spacer that is mounted on top of a conventional CNC-machined metallic cavity to functionalize the resonator's capacitance. For the first time, it is demonstrated that low-frequency resonators with micrometer-scale gaps (10s of microns), relatively large Q-factor (459-505) and tunable response (18.5%) can be constructed without the need for post-fabrication tuning. To demonstrate these benefits, a resonator assembly was designed, built and experimentally tested at the UHF band and for a frequency tuning range between 1424-1711 MHz.
UR - https://www.scopus.com/pages/publications/84931030243
U2 - 10.1109/MEMSYS.2015.7051135
DO - 10.1109/MEMSYS.2015.7051135
M3 - Conference proceeding
AN - SCOPUS:84931030243
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1020
EP - 1023
BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Y2 - 18 January 2015 through 22 January 2015
ER -