Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

  • Niels Quack
  • , Hamed Sattari
  • , Alain Y. Takabayashi
  • , Yu Zhang
  • , Pierre Edinger
  • , Carlos Errando-Herranz
  • , Kristinn B. Gylfason
  • , Xiaojing Wang
  • , Frank Niklaus
  • , Moises A. Jezzini
  • , How Yuan Hwang
  • , Peter O'Brien
  • , Marco A.G. Porcel
  • , Cristina Lerma Arce
  • , Saurav Kumar
  • , Banafsheh Abasahl
  • , Peter Verheyen
  • , Wim Bogaerts

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

Original languageEnglish
Title of host publicationOptical Fiber Communication Conference, OFC 2019
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580538
Publication statusPublished - 2019
EventOptical Fiber Communication Conference, OFC 2019 - San Diego, United States
Duration: 3 Mar 20197 Mar 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F160-OFC 2019
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Fiber Communication Conference, OFC 2019
Country/TerritoryUnited States
CitySan Diego
Period3/03/197/03/19

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