Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Niels Quack; Hamed Sattari; Alain Y. Takabayashi; Yu Zhang; Pierre Edinger; Carlos Errando-Herranz; Kristinn B. Gylfason; Xiaojing Wang; Frank Niklaus; Moises A. Jezzini; How Yuan Hwang; Peter O'Brien; Marco A.G. Porcel; Cristina Lerma Arce; Saurav Kumar; Banafsheh Abasahl; Peter Verheyen; Wim Bogaerts

doi:10.1364/ofc.2019.m2d.3

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Niels Quack
, Hamed Sattari
, Alain Y. Takabayashi
, Yu Zhang
, Pierre Edinger
, Carlos Errando-Herranz
, Kristinn B. Gylfason
, Xiaojing Wang
, Frank Niklaus
, Moises A. Jezzini
, How Yuan Hwang
, Peter O'Brien
, Marco A.G. Porcel
, Cristina Lerma Arce
, Saurav Kumar
, Banafsheh Abasahl
, Peter Verheyen
, Wim Bogaerts

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

Original language	English
Title of host publication	2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580538
DOIs	https://doi.org/10.1364/ofc.2019.m2d.3
Publication status	Published - 22 Apr 2019
Event	2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - San Diego, United States Duration: 3 Mar 2019 → 7 Mar 2019

Publication series

Name	2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings

Conference

Conference	2019 Optical Fiber Communications Conference and Exhibition, OFC 2019
Country/Territory	United States
City	San Diego
Period	3/03/19 → 7/03/19

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10.1364/ofc.2019.m2d.3

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Quack, N., Sattari, H., Takabayashi, A. Y., Zhang, Y., Edinger, P., Errando-Herranz, C., Gylfason, K. B., Wang, X., Niklaus, F., Jezzini, M. A., Hwang, H. Y., O'Brien, P., Porcel, M. A. G., Arce, C. L., Kumar, S., Abasahl, B., Verheyen, P., & Bogaerts, W. (2019). Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. In 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings Article 8696652 (2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1364/ofc.2019.m2d.3

Quack, Niels ; Sattari, Hamed ; Takabayashi, Alain Y. et al. / Silicon Photonic MEMS : Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings).

@inbook{3f914c9a18e3420bb67657d074fe6aed,

title = "Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits",

abstract = "With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.",

author = "Niels Quack and Hamed Sattari and Takabayashi, \{Alain Y.\} and Yu Zhang and Pierre Edinger and Carlos Errando-Herranz and Gylfason, \{Kristinn B.\} and Xiaojing Wang and Frank Niklaus and Jezzini, \{Moises A.\} and Hwang, \{How Yuan\} and Peter O'Brien and Porcel, \{Marco A.G.\} and Arce, \{Cristina Lerma\} and Saurav Kumar and Banafsheh Abasahl and Peter Verheyen and Wim Bogaerts",

note = "Publisher Copyright: {\textcopyright} 2019 OSA.; 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 ; Conference date: 03-03-2019 Through 07-03-2019",

year = "2019",

month = apr,

day = "22",

doi = "10.1364/ofc.2019.m2d.3",

language = "English",

series = "2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings",

address = "United States",

}

Quack, N, Sattari, H, Takabayashi, AY, Zhang, Y, Edinger, P, Errando-Herranz, C, Gylfason, KB, Wang, X, Niklaus, F, Jezzini, MA, Hwang, HY , O'Brien, P, Porcel, MAG, Arce, CL, Kumar, S, Abasahl, B, Verheyen, P & Bogaerts, W 2019, Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. in 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings., 8696652, 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019, San Diego, United States, 3/03/19. https://doi.org/10.1364/ofc.2019.m2d.3

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. / Quack, Niels; Sattari, Hamed; Takabayashi, Alain Y. et al.
2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8696652 (2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

TY - CHAP

T1 - Silicon Photonic MEMS

T2 - 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019

AU - Quack, Niels

AU - Sattari, Hamed

AU - Takabayashi, Alain Y.

AU - Zhang, Yu

AU - Edinger, Pierre

AU - Errando-Herranz, Carlos

AU - Gylfason, Kristinn B.

AU - Wang, Xiaojing

AU - Niklaus, Frank

AU - Jezzini, Moises A.

AU - Hwang, How Yuan

AU - O'Brien, Peter

AU - Porcel, Marco A.G.

AU - Arce, Cristina Lerma

AU - Kumar, Saurav

AU - Abasahl, Banafsheh

AU - Verheyen, Peter

AU - Bogaerts, Wim

PY - 2019/4/22

Y1 - 2019/4/22

N2 - With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

AB - With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

UR - https://www.scopus.com/pages/publications/85065483032

U2 - 10.1364/ofc.2019.m2d.3

DO - 10.1364/ofc.2019.m2d.3

M3 - Chapter

AN - SCOPUS:85065483032

T3 - 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings

BT - 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 3 March 2019 through 7 March 2019

ER -

Quack N, Sattari H, Takabayashi AY, Zhang Y, Edinger P, Errando-Herranz C et al. Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits. In 2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8696652. (2019 Optical Fiber Communications Conference and Exhibition, OFC 2019 - Proceedings). doi: 10.1364/ofc.2019.m2d.3

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

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