Abstract
Linear arrays of single photon avalanche detectors (SPADs), fabricated using a novel planar process that is compatible with CMOS technology, are presented here. Their suitability for application in fluorescence correlation spectroscopy (FCS) is investigated by examining characteristics such as the dark counting rate, breakdown voltage and quantum efficiency. The problem of optical crosstalk between pixels in the array is investigated and a trench isolation process is proposed to eliminate crosstalk between adjacent pixels in the array.
| Original language | English |
|---|---|
| Pages (from-to) | 122-128 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3105 |
| DOIs | |
| Publication status | Published - 1997 |
| Event | Chemical, Biochemical and Environmental Fiber Senors IX - Munich, Germany Duration: 16 Jun 1997 → 18 Jun 1997 |
Keywords
- Avalanche photodetectors
- Fluorescence imaging
- Single photon counting
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