Abstract
Linear arrays of single photon avalanche detectors (SPADs) designed for use in low light level imaging applications were fabricated using a novel planar process that is compatible with standard CMOS technology. The device characteristics for these arrays are presented here to investigate their suitability for high efficiency low light level imaging. A new scheme is proposed to eliminate the problem of optical crosstalk between pixels in the array by introducing a trench isolation process coupled with silicon-on-insulator (SOI) technology.
| Original language | English |
|---|---|
| Pages (from-to) | 333-340 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3114 |
| DOIs | |
| Publication status | Published - 1997 |
| Event | Proceedings of the 1997 EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII - San Diego, CA, United States Duration: 30 Jul 1997 → 1 Aug 1997 |
Keywords
- Astronomical imaging
- Linear imaging array
- Low light level detection
- Single photon avalanche detectors
Fingerprint
Dive into the research topics of 'Single photon avalanche detectors for low light level imaging'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver