Abstract
This paper presents the design and measurement of optimized inductors-on-silicon ("micro-inductors") for use in high frequency dc-dc conversion applications. These ultra-compact low profile (< 70 μm) inductors range in area from 0.5-2.5 mm2. The design process utilizes optimization software that finds the optimal physical dimensions, to maximize inductor efficiency, given certain technology constraints. Optimized micro-inductors achieve measured inductance densities of 66 nH/mm2 for a 2.5 mm2 area, 110 nH/mm2 for 1.3 mm device and 82 nH/mm2 for a 0.5 mm2 footprint area. Measured saturation currents range from 0.15-0.5 A for the optimized devices.
| Original language | English |
|---|---|
| Article number | 5257146 |
| Pages (from-to) | 4234-4237 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 45 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Oct 2009 |
Keywords
- Density
- Design tradeoffs
- Enhancement
- High frequency
- Optimization
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