SOI gated resistor: CMOS without junctions

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

We report the fabrication of junctionless SOI MOSFETs. Such devices greatly simplify processing thermal budget and behave as regular multigate SOI transistors.

Original languageEnglish
Title of host publication2009 IEEE International SOI Conference
DOIs
Publication statusPublished - 2009
Event2009 IEEE International SOI Conference - Foster City, CA, United States
Duration: 5 Oct 20098 Oct 2009

Publication series

NameProceedings - IEEE International SOI Conference
ISSN (Print)1078-621X

Conference

Conference2009 IEEE International SOI Conference
Country/TerritoryUnited States
CityFoster City, CA
Period5/10/098/10/09

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