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Sol-gel derived lead zirconate titanate thick films and their improved pyroelectric properties

  • Q. Zhang
  • , C. P. Shaw
  • , Z. Huang
  • , R. W. Whatmore

Research output: Other outputpeer-review

Abstract

The single-layer thickness of Pb(Zr0.3Ti0.7)O 3 (PZT 30/70) thin films made by the sol-gel process is often restricted by the appearance of cracks when a single layer is thicker than 100 nm. Making a film with 1 μm thick needs more than 10 times coating cycles, which is sometimes unacceptable. In this study, a sol modified with an additive was used for the preparation of thick PZT films. The thickness of the films depends upon the rotation rate. Up to 700 nm crack-free single layers could be obtained. The deposited films crystallised as the perovskite structure on platinum-buffered silicon by heating at 550°C. The porosity of the thick films was a function of the single layer thickness. A dense PZT film with a single layer 140 nm thick was found to have a very high pyroelectric coefficient (p = 2.36 × 10-4 CK-1 m-2) and figure of merit (1.88 × 10-5 Pa-0.5). The introduction of pores in the films reduced p. However, the figure of merit of the films exhibited a reasonably high value due to a dramatic reduction of dielectric constant.

Original languageEnglish
Number of pages10
Volume64
DOIs
Publication statusPublished - 2004

Publication series

NameIntegrated Ferroelectrics
PublisherTaylor and Francis Ltd.
ISSN (Print)1058-4587

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