Sol-gel PZT and MN-doped PZT thin films for pyroelectric applications

Q. Zhang; R. W. Whatmore

doi:10.1080/10584580108012806

Sol-gel PZT and MN-doped PZT thin films for pyroelectric applications

Q. Zhang
, R. W. Whatmore

Research output: Contribution to journal › Article › peer-review

Abstract

Thin films of ferroelectric lead zirconate titanate (PbZr _0.3Ti _0.7O ₃ PZT30/70) and manganese doped lead zirconate titanate ((Pb(Zr _0.3Ti _0.7) _1-xMn _x)O _3-x = 0.01, PM01ZT30/70 and x = 0.03, PM03ZT30/70) have been prepared using sol-gel processing techniques. These materials can be used as the pyroelectric thin films in uncooled infrared (IR) detectors. Films deposited on Pt/Ti/SiCVSi substrates and annealed on a hot plate at 530°C for 5 min were seen to fully crystallize into the required perovskite phase and showed excellent ferroelectric behavior, demonstrated by reproducible hysteresis loops (P _r = 33 to 37 μC/cm ², Ec(+) = 70 to 100 kV/cm, E _c(-) = -170 to -140 kV/cm). The pyroelectric coefficients (p) were measured using the Byer-Roundy method. At 20°C, p was 2.11 × 10 ^-4 Cm ^-2K ^-1 for PZT30/70, 3.00×10 ^-4 Cm ^-2K ^-1 for PM01ZT30/70 and 2.40×10 ^-4 Cm ^-2K ^-1 for PM03ZT30/70 thin films. The detectivity figures-of-merit (F _D) were 1.07×10 ^-5 Pa ^-0.5 for PZT30/70, 3.07×10 ^-5 Pa ^-0.5 for PM01ZT30/70 and 1.07×10 ^-0.5 Pa ^-0.5 for PM03ZT30/70. These figures compare well with values reported previously.

Original language	English
Pages (from-to)	43-50
Number of pages	8
Journal	Integrated Ferroelectrics
Volume	41
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108012806
Publication status	Published - 2001
Externally published	Yes

Keywords

Ferroelectrics
Manganese
Pyroelectrics
PZT
Sol-gel
Thin film

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10.1080/10584580108012806

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@article{ba3f2085f0cc42d1997d3ab8682b08ac,

title = "Sol-gel PZT and MN-doped PZT thin films for pyroelectric applications",

abstract = "Thin films of ferroelectric lead zirconate titanate (PbZr 0.3Ti 0.7O 3 PZT30/70) and manganese doped lead zirconate titanate ((Pb(Zr 0.3Ti 0.7) 1-xMn x)O 3-x = 0.01, PM01ZT30/70 and x = 0.03, PM03ZT30/70) have been prepared using sol-gel processing techniques. These materials can be used as the pyroelectric thin films in uncooled infrared (IR) detectors. Films deposited on Pt/Ti/SiCVSi substrates and annealed on a hot plate at 530°C for 5 min were seen to fully crystallize into the required perovskite phase and showed excellent ferroelectric behavior, demonstrated by reproducible hysteresis loops (P r = 33 to 37 μC/cm 2, Ec(+) = 70 to 100 kV/cm, E c(-) = -170 to -140 kV/cm). The pyroelectric coefficients (p) were measured using the Byer-Roundy method. At 20°C, p was 2.11 × 10 -4 Cm -2K -1 for PZT30/70, 3.00×10 -4 Cm -2K -1 for PM01ZT30/70 and 2.40×10 -4 Cm -2K -1 for PM03ZT30/70 thin films. The detectivity figures-of-merit (F D) were 1.07×10 -5 Pa -0.5 for PZT30/70, 3.07×10 -5 Pa -0.5 for PM01ZT30/70 and 1.07×10 -0.5 Pa -0.5 for PM03ZT30/70. These figures compare well with values reported previously.",

keywords = "Ferroelectrics, Manganese, Pyroelectrics, PZT, Sol-gel, Thin film",

author = "Q. Zhang and Whatmore, \{R. W.\}",

year = "2001",

doi = "10.1080/10584580108012806",

language = "English",

volume = "41",

pages = "43--50",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

}

TY - JOUR

T1 - Sol-gel PZT and MN-doped PZT thin films for pyroelectric applications

AU - Zhang, Q.

AU - Whatmore, R. W.

PY - 2001

Y1 - 2001

N2 - Thin films of ferroelectric lead zirconate titanate (PbZr 0.3Ti 0.7O 3 PZT30/70) and manganese doped lead zirconate titanate ((Pb(Zr 0.3Ti 0.7) 1-xMn x)O 3-x = 0.01, PM01ZT30/70 and x = 0.03, PM03ZT30/70) have been prepared using sol-gel processing techniques. These materials can be used as the pyroelectric thin films in uncooled infrared (IR) detectors. Films deposited on Pt/Ti/SiCVSi substrates and annealed on a hot plate at 530°C for 5 min were seen to fully crystallize into the required perovskite phase and showed excellent ferroelectric behavior, demonstrated by reproducible hysteresis loops (P r = 33 to 37 μC/cm 2, Ec(+) = 70 to 100 kV/cm, E c(-) = -170 to -140 kV/cm). The pyroelectric coefficients (p) were measured using the Byer-Roundy method. At 20°C, p was 2.11 × 10 -4 Cm -2K -1 for PZT30/70, 3.00×10 -4 Cm -2K -1 for PM01ZT30/70 and 2.40×10 -4 Cm -2K -1 for PM03ZT30/70 thin films. The detectivity figures-of-merit (F D) were 1.07×10 -5 Pa -0.5 for PZT30/70, 3.07×10 -5 Pa -0.5 for PM01ZT30/70 and 1.07×10 -0.5 Pa -0.5 for PM03ZT30/70. These figures compare well with values reported previously.

AB - Thin films of ferroelectric lead zirconate titanate (PbZr 0.3Ti 0.7O 3 PZT30/70) and manganese doped lead zirconate titanate ((Pb(Zr 0.3Ti 0.7) 1-xMn x)O 3-x = 0.01, PM01ZT30/70 and x = 0.03, PM03ZT30/70) have been prepared using sol-gel processing techniques. These materials can be used as the pyroelectric thin films in uncooled infrared (IR) detectors. Films deposited on Pt/Ti/SiCVSi substrates and annealed on a hot plate at 530°C for 5 min were seen to fully crystallize into the required perovskite phase and showed excellent ferroelectric behavior, demonstrated by reproducible hysteresis loops (P r = 33 to 37 μC/cm 2, Ec(+) = 70 to 100 kV/cm, E c(-) = -170 to -140 kV/cm). The pyroelectric coefficients (p) were measured using the Byer-Roundy method. At 20°C, p was 2.11 × 10 -4 Cm -2K -1 for PZT30/70, 3.00×10 -4 Cm -2K -1 for PM01ZT30/70 and 2.40×10 -4 Cm -2K -1 for PM03ZT30/70 thin films. The detectivity figures-of-merit (F D) were 1.07×10 -5 Pa -0.5 for PZT30/70, 3.07×10 -5 Pa -0.5 for PM01ZT30/70 and 1.07×10 -0.5 Pa -0.5 for PM03ZT30/70. These figures compare well with values reported previously.

KW - Ferroelectrics

KW - Manganese

KW - Pyroelectrics

KW - PZT

KW - Sol-gel

KW - Thin film

UR - https://www.scopus.com/pages/publications/0013237090

U2 - 10.1080/10584580108012806

DO - 10.1080/10584580108012806

M3 - Article

AN - SCOPUS:0013237090

SN - 1058-4587

VL - 41

SP - 43

EP - 50

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

ER -

Sol-gel PZT and MN-doped PZT thin films for pyroelectric applications

Abstract

Keywords

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