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Solid phase crystallisation of HfO
2
thin films
M. Modreanu
, J. Sancho-Parramon
,
D. O'Connell
,
J. Justice
, O. Durand
, B. Servet
Tyndall
School of Film, Music and Theatre
Tyndall MicroNano Systems
Tyndall Speciality Products And Services
University College Cork
Thales
Research output
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›
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2
thin films'. Together they form a unique fingerprint.
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Engineering
Thin Films
100%
Assisted Deposition
100%
Atomic Force Microscopy
66%
X Ray Diffraction
66%
Refractive Index
33%
Refractivity
33%
Good Agreement
33%
Crystalline Phase
33%
Deposition Method
33%
Smooth Surface
33%
Deposited Film
33%
Annealing Temperature
33%
Physical Characterization
33%
Density Gradient
33%
Free Carbon
33%
Crystalline State
33%
Material Science
Film
100%
Thin Films
100%
Ion Beam Assisted Deposition
100%
X-Ray Diffraction
66%
Atomic Force Microscopy
66%
Refractive Index
33%
Surface (Surface Science)
33%
Density
33%
Annealing
33%
Film Thickness
33%