Solid phase epitaxy versus random nucleation and growth in sub- 20 nm wide fin field-effect transistors

  • R. Duffy
  • , M. J.H. Van Dal
  • , B. J. Pawlak
  • , M. Kaiser
  • , R. G.R. Weemaes
  • , B. Degroote
  • , E. Kunnen
  • , E. Altamirano

Research output: Contribution to journal › Article › peer-review

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