Spatial statistics for micro/nanoelectronics and materials science

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Abstract

Spatial statistics is a specialized branch of statistics aimed to provide information about the locations of randomly distributed objects in 1, 2 or 3 dimensions. The analysis involves data exploration, parameter estimation, model fitting and hypothesis formulation. In particular, in this work, we present some recent advances in the characterization of the spatial distribution of breakdown spots over the gate electrode of Metal-Insulator-Semiconductor and Metal-Insulator-Metal structures. The spots are regarded as a two-dimensional point pattern, which is analyzed using intensity plots, spatial counting methods, inter-event distance histograms and functional summary estimators. The methods reported here are general so that they can be applied to many different research fields.

Original languageEnglish
Title of host publication2012 28th International Conference on Microelectronics - Proceedings, MIEL 2012
Pages23-30
Number of pages8
DOIs
Publication statusPublished - 2012
Event2012 28th International Conference on Microelectronics, MIEL 2012 - Nis, Serbia
Duration: 13 May 201216 May 2012

Publication series

Name2012 28th International Conference on Microelectronics - Proceedings, MIEL 2012

Conference

Conference2012 28th International Conference on Microelectronics, MIEL 2012
Country/TerritorySerbia
CityNis
Period13/05/1216/05/12

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