Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012

Mircea Modreanu; Olivier Durand; Gerald E. Jellison; Giancarlo Salviati; Miklos Fried

doi:10.1016/j.tsf.2013.07.027

Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012

Mircea Modreanu
, Olivier Durand
, Gerald E. Jellison
, Giancarlo Salviati
, Miklos Fried

Université Européenne de Bretagne
Oak Ridge National Laboratory
University of Parma
Research Institute for Technical Physics and Materials

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	1-2
Number of pages	2
Journal	Thin Solid Films
Volume	541
DOIs	https://doi.org/10.1016/j.tsf.2013.07.027
Publication status	Published - 31 Aug 2013

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10.1016/j.tsf.2013.07.027

Cite this

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title = "Special issue on {"}current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III{"}, E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012",

author = "Mircea Modreanu and Olivier Durand and Jellison, \{Gerald E.\} and Giancarlo Salviati and Miklos Fried",

year = "2013",

month = aug,

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doi = "10.1016/j.tsf.2013.07.027",

language = "English",

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journal = "Thin Solid Films",

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AU - Modreanu, Mircea

AU - Durand, Olivier

AU - Jellison, Gerald E.

AU - Salviati, Giancarlo

AU - Fried, Miklos

PY - 2013/8/31

Y1 - 2013/8/31

UR - https://www.scopus.com/pages/publications/84880842403

U2 - 10.1016/j.tsf.2013.07.027

DO - 10.1016/j.tsf.2013.07.027

M3 - Editorial

AN - SCOPUS:84880842403

SN - 0040-6090

VL - 541

SP - 1

EP - 2

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Special issue on "current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III", E-MRS Spring 2012 - Symposium W, held in Strasbourg, France, May 14-18, 2012

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