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Spectroscopic study of La2O3 thin films deposited by indigenously developed plasma-enhanced atomic layer deposition system

  • Viral Barhate
  • , Khushabu Agrawal
  • , Vilas Patil
  • , Sumit Patil
  • , Ashok Mahajan
  • North Maharashtra University

Research output: Contribution to journal › Article › peer-review

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