State of the art in prediction of mechanical behaviour of microsystems

Maryna Lishchynska; Nicolas Cordero; Orla Slattery

State of the art in prediction of mechanical behaviour of microsystems

Maryna Lishchynska
, Nicolas Cordero
, Orla Slattery

University College Cork

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

Behavioural models as analytical expressions relating loading parameters, material properties, and geometry of the microstructure with its performance characteristics are essential items in the toolbox of MEMS designer. Unfortunately well-known classic equations derived for idealized macrostructures do not always work for microcomponents. Thus alternative behavioural models need to be developed. Establishing behavioural models of microsystems is an all-important but challenging task. This paper presents an overview of different approaches to predicting the mechanical behaviour of microsystems and problems that need to be addressed. Analytical and numerical techniques are mainly considered. The paper concentrates on the merits, utilities and wide applicability of numerical modelling of MEMS behaviour. The development of analytical expressions for predicting mechanical performance of microcantilever beams is demonstrated as a case study in this paper. Mathematical models of deflections of microcantilevers on supports (pillars or anchors) subjected to either uniform or concentrated external load were extracted from Finite Element simulations results and are presented in the paper. The models accurately predict deflections of considered microstructures.

Original language	English
Title of host publication	Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004
Editors	L.J. Ernst, G.Q. Zhang, P. Rodgers, O. Saint Leger
Pages	287-294
Number of pages	8
Publication status	Published - 2004
Event	Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004 - Brussels, Belgium Duration: 10 May 2004 → 12 May 2004

Publication series

Name	Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

Conference

Conference	Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004
Country/Territory	Belgium
City	Brussels
Period	10/05/04 → 12/05/04

Cite this

Lishchynska, M., Cordero, N., & Slattery, O. (2004). State of the art in prediction of mechanical behaviour of microsystems. In L. J. Ernst, G. Q. Zhang, P. Rodgers, & O. Saint Leger (Eds.), Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004 (pp. 287-294). (Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004).

Lishchynska, Maryna ; Cordero, Nicolas ; Slattery, Orla. / State of the art in prediction of mechanical behaviour of microsystems. Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004. editor / L.J. Ernst ; G.Q. Zhang ; P. Rodgers ; O. Saint Leger. 2004. pp. 287-294 (Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004).

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title = "State of the art in prediction of mechanical behaviour of microsystems",

abstract = "Behavioural models as analytical expressions relating loading parameters, material properties, and geometry of the microstructure with its performance characteristics are essential items in the toolbox of MEMS designer. Unfortunately well-known classic equations derived for idealized macrostructures do not always work for microcomponents. Thus alternative behavioural models need to be developed. Establishing behavioural models of microsystems is an all-important but challenging task. This paper presents an overview of different approaches to predicting the mechanical behaviour of microsystems and problems that need to be addressed. Analytical and numerical techniques are mainly considered. The paper concentrates on the merits, utilities and wide applicability of numerical modelling of MEMS behaviour. The development of analytical expressions for predicting mechanical performance of microcantilever beams is demonstrated as a case study in this paper. Mathematical models of deflections of microcantilevers on supports (pillars or anchors) subjected to either uniform or concentrated external load were extracted from Finite Element simulations results and are presented in the paper. The models accurately predict deflections of considered microstructures.",

author = "Maryna Lishchynska and Nicolas Cordero and Orla Slattery",

year = "2004",

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booktitle = "Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004",

note = "Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004 ; Conference date: 10-05-2004 Through 12-05-2004",

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Lishchynska, M, Cordero, N & Slattery, O 2004, State of the art in prediction of mechanical behaviour of microsystems. in LJ Ernst, GQ Zhang, P Rodgers & O Saint Leger (eds), Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004. Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004, pp. 287-294, Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004, Brussels, Belgium, 10/05/04.

State of the art in prediction of mechanical behaviour of microsystems. / Lishchynska, Maryna; Cordero, Nicolas; Slattery, Orla.
Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004. ed. / L.J. Ernst; G.Q. Zhang; P. Rodgers; O. Saint Leger. 2004. p. 287-294 (Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

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AU - Cordero, Nicolas

AU - Slattery, Orla

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AB - Behavioural models as analytical expressions relating loading parameters, material properties, and geometry of the microstructure with its performance characteristics are essential items in the toolbox of MEMS designer. Unfortunately well-known classic equations derived for idealized macrostructures do not always work for microcomponents. Thus alternative behavioural models need to be developed. Establishing behavioural models of microsystems is an all-important but challenging task. This paper presents an overview of different approaches to predicting the mechanical behaviour of microsystems and problems that need to be addressed. Analytical and numerical techniques are mainly considered. The paper concentrates on the merits, utilities and wide applicability of numerical modelling of MEMS behaviour. The development of analytical expressions for predicting mechanical performance of microcantilever beams is demonstrated as a case study in this paper. Mathematical models of deflections of microcantilevers on supports (pillars or anchors) subjected to either uniform or concentrated external load were extracted from Finite Element simulations results and are presented in the paper. The models accurately predict deflections of considered microstructures.

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T3 - Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

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Lishchynska M, Cordero N, Slattery O. State of the art in prediction of mechanical behaviour of microsystems. In Ernst LJ, Zhang GQ, Rodgers P, Saint Leger O, editors, Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004. 2004. p. 287-294. (Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004).

State of the art in prediction of mechanical behaviour of microsystems

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