Step ordering induced by nonplanar patterning of GaAs surfaces

A. Dalla Volta; D. D. Vvedensky; N. Gogneau; E. Pelucchi; A. Rudra; B. Dwir; E. Kapon; C. Ratsch

doi:10.1063/1.2204441

Step ordering induced by nonplanar patterning of GaAs surfaces

A. Dalla Volta
, D. D. Vvedensky
, N. Gogneau
, E. Pelucchi
, A. Rudra
, B. Dwir
, E. Kapon
, C. Ratsch

Research output: Contribution to journal › Article › peer-review

Abstract

We report the observation and theory of the morphological evolution of vicinal (001) ridges on V-grooved GaAs surfaces during metal organic vapor-phase epitaxy. The pattern of the nonplanar substrate induces unusual ordering of monatomic steps, different from the free step flow observed on a nonpatterned vicinal surface. The step edges develop profiles that kinetic Monte Carlo simulations reveal are determined by the width of the ridges between neighboring V grooves and the kinetics of interfacet mass migration between the ridge and the bounding sidewalls of the V groove.

Original language	English
Article number	203104
Journal	Applied Physics Letters
Volume	88
Issue number	20
DOIs	https://doi.org/10.1063/1.2204441
Publication status	Published - 15 May 2006
Externally published	Yes

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10.1063/1.2204441

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title = "Step ordering induced by nonplanar patterning of GaAs surfaces",

abstract = "We report the observation and theory of the morphological evolution of vicinal (001) ridges on V-grooved GaAs surfaces during metal organic vapor-phase epitaxy. The pattern of the nonplanar substrate induces unusual ordering of monatomic steps, different from the free step flow observed on a nonpatterned vicinal surface. The step edges develop profiles that kinetic Monte Carlo simulations reveal are determined by the width of the ridges between neighboring V grooves and the kinetics of interfacet mass migration between the ridge and the bounding sidewalls of the V groove.",

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T1 - Step ordering induced by nonplanar patterning of GaAs surfaces

AU - Dalla Volta, A.

AU - Vvedensky, D. D.

AU - Gogneau, N.

AU - Pelucchi, E.

AU - Rudra, A.

AU - Dwir, B.

AU - Kapon, E.

AU - Ratsch, C.

PY - 2006/5/15

Y1 - 2006/5/15

N2 - We report the observation and theory of the morphological evolution of vicinal (001) ridges on V-grooved GaAs surfaces during metal organic vapor-phase epitaxy. The pattern of the nonplanar substrate induces unusual ordering of monatomic steps, different from the free step flow observed on a nonpatterned vicinal surface. The step edges develop profiles that kinetic Monte Carlo simulations reveal are determined by the width of the ridges between neighboring V grooves and the kinetics of interfacet mass migration between the ridge and the bounding sidewalls of the V groove.

AB - We report the observation and theory of the morphological evolution of vicinal (001) ridges on V-grooved GaAs surfaces during metal organic vapor-phase epitaxy. The pattern of the nonplanar substrate induces unusual ordering of monatomic steps, different from the free step flow observed on a nonpatterned vicinal surface. The step edges develop profiles that kinetic Monte Carlo simulations reveal are determined by the width of the ridges between neighboring V grooves and the kinetics of interfacet mass migration between the ridge and the bounding sidewalls of the V groove.

UR - https://www.scopus.com/pages/publications/33646856255

U2 - 10.1063/1.2204441

DO - 10.1063/1.2204441

M3 - Article

AN - SCOPUS:33646856255

SN - 0003-6951

VL - 88

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 20

M1 - 203104

ER -

Step ordering induced by nonplanar patterning of GaAs surfaces

Abstract

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