Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0. 53Ga0. 47As surfaces by atomic layer deposition

Rathnait D Long; Éamon O’Connor; Simon B Newcomb; Scott Monaghan; Karim Cherkaoui; P Casey; Gregory Hughes; Kevin K Thomas; F Chalvet; Ian M Povey; others

Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0. 53Ga0. 47As surfaces by atomic layer deposition

Rathnait D Long
, Éamon O’Connor
, Simon B Newcomb
, Scott Monaghan
, Karim Cherkaoui
, P Casey
, Gregory Hughes
, Kevin K Thomas
, F Chalvet
, Ian M Povey
, others

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Applied Physics
Publication status	Published - 2009

Cite this

@article{34d8af179f9f4c78821ca620ef44bb03,

title = "Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0. 53Ga0. 47As surfaces by atomic layer deposition",

author = "Long, \{Rathnait D\} and {\'E}amon O{\textquoteright}Connor and Newcomb, \{Simon B\} and Scott Monaghan and Karim Cherkaoui and P Casey and Gregory Hughes and Thomas, \{Kevin K\} and F Chalvet and Povey, \{Ian M\} and others",

year = "2009",

language = "Undefined/Unknown",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0. 53Ga0. 47As surfaces by atomic layer deposition

AU - Long, Rathnait D

AU - O’Connor, Éamon

AU - Newcomb, Simon B

AU - Monaghan, Scott

AU - Cherkaoui, Karim

AU - Casey, P

AU - Hughes, Gregory

AU - Thomas, Kevin K

AU - Chalvet, F

AU - Povey, Ian M

AU - others,

PY - 2009

Y1 - 2009

M3 - Article

SN - 0021-8979

JO - Journal of Applied Physics

JF - Journal of Applied Physics

ER -