Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0. 53Ga0. 47As capacitors with and without an Al2O3 interface control layer

Aileen O’Mahony; Scott Monaghan; G Provenzano; Ian M Povey; MG Nolan; Éamon O’Connor; Karim Cherkaoui; Simon B Newcomb; Felice Crupi; Paul K Hurley; others

Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0. 53Ga0. 47As capacitors with and without an Al2O3 interface control layer

Aileen O’Mahony
, Scott Monaghan
, G Provenzano
, Ian M Povey
, MG Nolan
, Éamon O’Connor
, Karim Cherkaoui
, Simon B Newcomb
, Felice Crupi
, Paul K Hurley
, others

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Applied Physics Letters
Publication status	Published - 2010

Cite this

@article{8ca149052c6a4e30ab3d9c024faf58f2,

title = "Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0. 53Ga0. 47As capacitors with and without an Al2O3 interface control layer",

author = "Aileen O{\textquoteright}Mahony and Scott Monaghan and G Provenzano and Povey, \{Ian M\} and MG Nolan and {\'E}amon O{\textquoteright}Connor and Karim Cherkaoui and Newcomb, \{Simon B\} and Felice Crupi and Hurley, \{Paul K\} and others",

year = "2010",

language = "Undefined/Unknown",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0. 53Ga0. 47As capacitors with and without an Al2O3 interface control layer

AU - O’Mahony, Aileen

AU - Monaghan, Scott

AU - Provenzano, G

AU - Povey, Ian M

AU - Nolan, MG

AU - O’Connor, Éamon

AU - Cherkaoui, Karim

AU - Newcomb, Simon B

AU - Crupi, Felice

AU - Hurley, Paul K

AU - others,

PY - 2010

Y1 - 2010

M3 - Article

SN - 0003-6951

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -