Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs

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@article{2f7a5218f46a4cb2bdaf75b0ee593b43,

title = "Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs",

author = "Ailbe O'Manachain",

year = "2014",

doi = "10.1016/J.TSF.2014.08.025",

language = "Undefined/Unknown",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}