Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs

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@article{40d95910051646009681768a988c3773,

title = "Structural and optical properties of post-annealed atomic-layer-deposited HfO2 thin films on GaAs",

author = "NS Bennett and Karim Cherkaoui and CS Wong and {\'E}amon O'Connor and Scott Monaghan and P Hurley and L Chauhan and PJ McNally",

year = "2014",

language = "Undefined/Unknown",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}