Structure characterization of porous silicon layers based on a theoretical analysis

Caide Xiao; Rabah Boukherroub; James T.C. Wojtyk; Danial D.M. Wayner; John H.T. Luong

doi:10.1021/la025508p

Structure characterization of porous silicon layers based on a theoretical analysis

Caide Xiao
, Rabah Boukherroub
, James T.C. Wojtyk
, Danial D.M. Wayner
, John H.T. Luong

National Research Council of Canada

Research output: Contribution to journal › Article › peer-review

Abstract

A theoretical framework is presented to allow for the determination of the basic structural parameters of a porous silicon thin layer using constructive-destructive positions of Fabry-Perot fringes in air. The structural parameters include film thickness, porosity, and refractive index between 350 and 2000 nm. The model is general and can be applied to determine the optical properties of any thin layer that exhibits a Fabry-Perot fringe pattern. Such information is of importance to fabricate practical sensing devices with low costs for various applications in biomedicine and analytical and environmental chemistry.

Original language	English
Pages (from-to)	4165-4170
Number of pages	6
Journal	Langmuir
Volume	18
Issue number	10
DOIs	https://doi.org/10.1021/la025508p
Publication status	Published - 14 May 2002
Externally published	Yes

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abstract = "A theoretical framework is presented to allow for the determination of the basic structural parameters of a porous silicon thin layer using constructive-destructive positions of Fabry-Perot fringes in air. The structural parameters include film thickness, porosity, and refractive index between 350 and 2000 nm. The model is general and can be applied to determine the optical properties of any thin layer that exhibits a Fabry-Perot fringe pattern. Such information is of importance to fabricate practical sensing devices with low costs for various applications in biomedicine and analytical and environmental chemistry.",

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AU - Xiao, Caide

AU - Boukherroub, Rabah

AU - Wojtyk, James T.C.

AU - Wayner, Danial D.M.

AU - Luong, John H.T.

PY - 2002/5/14

Y1 - 2002/5/14

N2 - A theoretical framework is presented to allow for the determination of the basic structural parameters of a porous silicon thin layer using constructive-destructive positions of Fabry-Perot fringes in air. The structural parameters include film thickness, porosity, and refractive index between 350 and 2000 nm. The model is general and can be applied to determine the optical properties of any thin layer that exhibits a Fabry-Perot fringe pattern. Such information is of importance to fabricate practical sensing devices with low costs for various applications in biomedicine and analytical and environmental chemistry.

AB - A theoretical framework is presented to allow for the determination of the basic structural parameters of a porous silicon thin layer using constructive-destructive positions of Fabry-Perot fringes in air. The structural parameters include film thickness, porosity, and refractive index between 350 and 2000 nm. The model is general and can be applied to determine the optical properties of any thin layer that exhibits a Fabry-Perot fringe pattern. Such information is of importance to fabricate practical sensing devices with low costs for various applications in biomedicine and analytical and environmental chemistry.

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DO - 10.1021/la025508p

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JO - Langmuir

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Structure characterization of porous silicon layers based on a theoretical analysis

Abstract

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