@inbook{a285b04b53e8432088fe19f44f0e0dec,
title = "Study of low-K film repair and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide",
author = "Eduardo Vyhmeister and Lischen Choate and David Suleiman and Est{\'e}vez, \{L. Antonio\} and Anthony Muscat",
year = "2007",
language = "English",
isbn = "9780816910229",
series = "AIChE Annual Meeting, Conference Proceedings",
booktitle = "2007 AIChE Annual Meeting",
note = "2007 AIChE Annual Meeting ; Conference date: 04-11-2007 Through 09-11-2007",
}