Suitability of high-k gate oxides for III-V devices: A PBTI study in In0.53Ga0.47As devices with Al2O3

  • J. Franco
  • , A. Alian
  • , B. Kaczer
  • , D. Lin
  • , T. Ivanov
  • , A. Pourghaderi
  • , K. Martens
  • , Y. Mols
  • , D. Zhou
  • , N. Waldron
  • , S. Sioncke
  • , T. Kauerauf
  • , N. Collaert
  • , A. Thean
  • , M. Heyns
  • , G. Groeseneken

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

We present a comprehensive study of Positive Bias Temperature Instability (PBTI) in In0.53Ga0.47As devices with Al2O 3 gate oxide, and with varying thickness of the channel quantum well. We show significant instability of the device electrical parameters induced by electron trapping into a wide distribution of defects in the high-k layer, with energy levels just above the InGaAs conduction band. A significant PBTI dependence on the channel thickness is found and ascribed to quantization effects. We argue that, in order to be relevant for production, the superior transport properties of III-V channels will need to be demonstrated with more stable high-k gate stacks.

Original languageEnglish
Title of host publication2014 IEEE International Reliability Physics Symposium, IRPS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages6A.2.1-6A.2.6
ISBN (Print)9781479933167
DOIs
Publication statusPublished - 2014
Externally publishedYes
Event52nd IEEE International Reliability Physics Symposium, IRPS 2014 - Waikoloa, HI, United States
Duration: 1 Jun 20145 Jun 2014

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference52nd IEEE International Reliability Physics Symposium, IRPS 2014
Country/TerritoryUnited States
CityWaikoloa, HI
Period1/06/145/06/14

Keywords

  • Bias Temperature Instability
  • III-V
  • InGaAs
  • Quantum Well
  • Reliability

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