Surface plasmon resonance sensor with silicon-based prism coupling

Sergiy Patskovsky; Andrei V. Kabashin; Michel Meunier; John H.T. Luong

doi:10.1117/12.477863

Surface plasmon resonance sensor with silicon-based prism coupling

Sergiy Patskovsky
, Andrei V. Kabashin
, Michel Meunier
, John H.T. Luong

Research output: Contribution to journal › Article › peer-review

Abstract

We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.

Original language	English
Pages (from-to)	144-148
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4958
DOIs	https://doi.org/10.1117/12.477863
Publication status	Published - 2003
Externally published	Yes
Event	PROGRESS IN BIOMEDICAL OPTICS AND IMAGING: Advanced Biomedical and Clinical Diagnostic Systems - San Jose, CA, United States Duration: 26 Jan 2003 → 28 Jan 2003

Keywords

Dispersion
Infrared
Silicon
Surface plasmon resonance

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/12.477863

Cite this

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title = "Surface plasmon resonance sensor with silicon-based prism coupling",

abstract = "We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.",

keywords = "Dispersion, Infrared, Silicon, Surface plasmon resonance",

author = "Sergiy Patskovsky and Kabashin, \{Andrei V.\} and Michel Meunier and Luong, \{John H.T.\}",

year = "2003",

doi = "10.1117/12.477863",

language = "English",

volume = "4958",

pages = "144--148",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "PROGRESS IN BIOMEDICAL OPTICS AND IMAGING: Advanced Biomedical and Clinical Diagnostic Systems ; Conference date: 26-01-2003 Through 28-01-2003",

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TY - JOUR

T1 - Surface plasmon resonance sensor with silicon-based prism coupling

AU - Patskovsky, Sergiy

AU - Kabashin, Andrei V.

AU - Meunier, Michel

AU - Luong, John H.T.

PY - 2003

Y1 - 2003

N2 - We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.

AB - We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.

KW - Dispersion

KW - Infrared

KW - Silicon

KW - Surface plasmon resonance

UR - https://www.scopus.com/pages/publications/0344851526

U2 - 10.1117/12.477863

DO - 10.1117/12.477863

M3 - Article

AN - SCOPUS:0344851526

SN - 0277-786X

VL - 4958

SP - 144

EP - 148

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROGRESS IN BIOMEDICAL OPTICS AND IMAGING: Advanced Biomedical and Clinical Diagnostic Systems

Y2 - 26 January 2003 through 28 January 2003

ER -

Surface plasmon resonance sensor with silicon-based prism coupling

Abstract

Keywords

UN SDGs

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